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SemiconductorManufacturingTechnology
-Chap.1IntroductionByDr.YueShen
Whoisthisguy?Name:YueShen(沈越)ResearchInterests:NanoMaterialsDevicesMicrofluidicChipsLithium-airBatteriesTel:Email:
Discussion:Whydidyouchoosethiscourse?CreditsTechniques?AbilitytoSolveproblem?Knowingthemostsophisticatedman-madesystem
YourScore20%:PerformanceinclassesAssignments80%:Finalexam
TEXTBOOKS
ReferenceBooks
1、HistoryoftheSemiconductorManufacturingTechniques－SemiconductorMaterials－SemiconductorDevices－SemiconductorProcessing
1.1SemiconductorMaterialsNarrowsense：Themajorsemiconductingmaterialsinthemicroelectronicindustry:Germanium（Ge）、Sillicon（Si）、GalliumArsenide（GaAs）。Broadsense：Othersemiconductors,includingmetaloxides(ZnO),organicsemiconductors,CNTs,etal.
ComparisonoftheSemiconductorsMaterialBandgapdescriptionGe0.66eVEarliestsemiconductor，Firsttransistorin1947Si1.12eVMostcommonsemiconductor；Easytoformhighqualityoxidizedlayer；LargerbandgapthanGe，Higherworkingtemperature；Cheap.GaAs1.42eVHigherelectronmobility，Goodforhighspeeddevices；Poorthermalstability，Highdefectdensity，lowintrinsicoxidizationrate
1.2SemiconductorDevicesYearDeviceInventor1874金属－半导体接触Metal-SemiconductorcontactBraun1907发光二极管LEDRound1947双极晶体管BipolarTransistorBardeen,Brattain,Shockley1949PNjunctionShockley1952晶闸管ThyristorEbers1954SolarCellChapin,Fuller,Pearson
ThefirsttransistorBardeen,Brattain,ShockleywontheNobelPricein1956forthis.Comparingwithvacuumtubes,Transistorsarelighter,smaller,cheaperandlastlonger.
AthyristorReverseblockingmode—VoltageisappliedinthedirectionthatwouldbeblockedbyadiodeForwardblockingmode—Voltageisappliedinthedirectionthatwouldcauseadiodetoconduct,butthethyristorhasnotbeentriggeredintoconductionForwardconductingmode—Thethyristorhasbeentriggeredintoconductionandwillremainconductinguntiltheforward
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