基于可视化的真空镀膜装备专利竞争技术分析.pdfVIP

真空科学与技术学报第42卷第6期

422CHINESEJOURNALOFVACUUMSCIENCEANDTECHNOLOGY2022年6月

基于可视化的真空镀膜装备专利竞争技术分析

叶俊文黎子辉2高峰3李晓刚3王鸿志2

(1.广东省中山市质量技术监督标准与编码所中山528403;2.华南理工大学广州510641;

3.中山凯旋真空科技股份有限公司中山528478)

DataVisualAnalyticsTowardsPatentCompetitionTechnologyofVacuum

CoatingEquipment

YEJunwen1**,LIZihui2,GAOFeng3,LIXiaogang3,WANGHongzhi2

(1.ZhongshanInstituteofStandardization,Zhongshan528403,China;

2.SouthChinaUniversityofTechnology,Guangzhou510641,China;

3.ZhongshanKaixuanVacuumScienceTechnologyCo.Ltd.,Zhongshan528478,China)

AbstractInviewofthecurrentgapinprecisionvacuumcoatingequipmenttechnologybetweendomestic

andforeigncountries,thereareproblemssuchaslackofcoretechnology,uncleardirectionoftechnologydevelop­

ment,andlackofwillingnetoresearchanddevelop,weanalyzedthedomesticandforeignpatentsinformationof

vacuumcoatingequipmentbasedonvisualizationtechnology.Intheproceofexploringdataproceing,fieldcre­

ationandcombinationareusedtovisuallyanalyzethecurrentpatentsituationandtechnology,focusingonthetech­

nicalconcernsofforeignkeyequipmentmanufacturersofmagnetronsputtering(MS)inopticalfieldandatomiclay-

erdeposition(ALD)insemiconductorfieldunderthebackgroundoftechnicalbamers.Miningcompetitiveinforma­

tionsuchaspatentlayoutofkeycomponents,technicalefficacies,patentblanksandcomparativeadvantages.Visu­

alizedimagess