国外标准分享ASTM E908.docxVIP

Designation:E908–98(Reapproved2004)

StandardPracticefor

CalibratingGaseousReferenceLeaks1

Thisstandardisissuedunderthe?xeddesignationE908;thenumberimmediatelyfollowingthedesignationindicatestheyearof

originaladoptionor,inthecaseofrevision,theyearoflastrevision.Anumberinparenthesesindicatestheyearoflastreapproval.A

superscriptepsilon(e)indicatesaneditorialchangesincethelastrevisionorreapproval.

1.Scope

E427PracticeforTestingforLeaksUsingtheHalogen

LeakDetector(Alkali-IonDiode)3

E479GuideforPreparationofaLeakTestingSpeci?ca-

tion3

F134TestMethodsforDeterminingHermeticityofElec-

tronDevicesWithaHeliumMassSpectrometerLeak

Detector3

2.2OtherDocuments:

AVS2.2-1968MethodforVacuumLeakCalibration4

RecommendedPracticesfortheCalibrationandUseof

Leaks5

1.1Thispracticecoversproceduresforcalibratingleak

artifactsofaspeci?edgas,thatmaybeusedfordetermining

theresponseofleakdetectors,orinothersituationswherea

knownsmall?owofgasisrequired.Thepurposeofthis

practiceistoestablishcalibrationwithoutreferencetoother

calibratedleaksinasstraightforwardamanneraspossible

usingthelikeliestavailableequipment.Whiletheuncertainties

associatedwiththeseprocedureswillmostlikelybegreater

thanthoseobtainedviatraceablecalibrationchains(onthe

orderof10%),theseproceduresallowindependentmeansof

establishingorverifyingtheleakageratefromleakartifactsof

questionablehistory,orwhentraceableleakartifactsarenot

available.

1.2Twotypesofleaksareconsidered:

1.2.1TypeI—Pressuretovacuum.

1.2.2TypeII—Pressuretoatmosphere.

1.3Threecalibrationmethodsaredescribedundereachtype

ofreferenceleak:

1.3.1MethodA—Accumulationcomparison,usingaknown

volumeofgasatspeci?edconditionsoftemperaturean