电子器件 技术文件models.molec.s_bend_benchmark.pdfVIP

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电子器件 技术文件models.molec.s_bend_benchmark.pdf

SolvedwithCOMSOLMultiphysics5.1

BenchmarkModelofMolecularFlow

ThroughanS-Bend

Introduction

Computingmolecularflowsinarbitrarygeometriesproducescomplexintegral

equationsthatareverydifficulttocomputeanalytically.Therearetwowidelyused

methodsformodelingmolecularflows,theMonteCarlomethod(whichcomputesthe

trajectoriesoflargenumbersofrandomizedparticlesthroughthesystem)andthe

angularcoefficientmethod.TheFreeMolecularFlowinterfacesusestheangular

coefficientmethod,whi

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