SEMI E40—0705加工管理标准.pdf

SEMIE40-0705

STANDARDFORPROCESSINGMANAGEMENT

ThisstandardwastechnicallyapprovedbytheglobalInformationControlCommittee.Thiseditionwas

approvedforpublicationbytheglobalAuditsandReviewsSubcommitteeonApril7,2005.Itwasavailable

atinJune2005andonCD-ROMinJuly2005.Originallypublishedin1995;lastpublished

June2003.

1Purpose

1.1Automatedmanagementandcommandofmaterialprocessinginequipmentisacrucialaspectenablingfactory

automation.Thisstandard

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