湿法腐蚀硅片并生长氧化锌纳米棒作为太阳能电池减反层研究.pdfVIP

第28 卷 第4 期 无 机 材 料 学 报 Vol. 28 No. 4 2013 年4 月 Journal of Inorganic Materials Apr., 2013 文章编号: 1000-324X(2013)04-0420-05 DOI: 10.3724/SP.J.1077.2013.12306 湿法腐蚀硅片并生长氧化锌纳米棒作为太阳能电池减反层研究 王 韬, 屈新萍 (复旦大学 专用集成电路与系统国家重点实验室, 微电子学系, 上海 200433) 摘 要: 在硅基太阳能电池表面制备减反层可以有效降低硅表面的反射率, 提高吸收率, 从而提高硅基太阳能电池 的光电转换效率。本研究利用四甲基氢氧化铵(Tetramethyl Ammonium Hydroxide TMAH)溶液对(100)单晶硅进行各 向异性腐蚀, 在表面腐蚀出金字塔结构, 得到了最低为 6%左右的反射率。然后采用水热法在该衬底生长氧化锌纳 米棒, 得到了最低小于3% 的反射率, 比单采用腐蚀或者ZnO 纳米棒生长的硅表面的反射率更低。这种减反方法工 艺简单、高效, 有望得到应用。 关 键 词: 减反层; 四甲基氢氧化铵; 湿法腐蚀; 各向异性; ZnO 纳米棒 中图分类号: TK514 文献标识码: A Research on ZnO Nanorods Grown on Si Substrate Etched by TMAH as Si Solar Cell Antireflection Layer WANG Tao, QU Xin-Ping (State key lab of ASIC and system, Department of Microelectronics, Fudan University, Shanghai 200433, China) Abstract: An antireflection layer grown on the Si surface of a solar cell can reduce reflection and increase absorption of light. As a result, it can increase the conversion efficiency of the Si solar cell. In this work, (100) Si wafers were anisotropically wet etched by tetramethyl ammonium hydroxide (TMAH) solution and the pyramidal structures were obtained. The minimum reflectivity of etched Si was lower than 6%. Then ZnO nanorods were grown on the Si substrate by a hydrothermal method. The minimum reflectivity of this structure was lower than 3%, better than that from the TMAH etched surface or ZnO nanorods covered surface only. This method has great potential because of its s