用于油库安全监测的气体传感器研究与设计3.pdfVIP

第 19 卷 　第 6 期 传 感 技 术 学 报 Vol . 19 　No . 6 2006 年 12 月 CH IN ESE J OU RNAL OF SEN SORS AND A C TUA TOR S Dec . 2006 Investigation and Design of the Gas Sensor Applying to OilStoreroom C H E N G D ongs heng , Y UA N Yuj ie , S UN Yicai , PA N Guof eng ( ) H ebei Uni vers ity of Technology , M icroelect ronics I ns t it ute Ti anj i n 300 130 , Chi na Abstract : Inve stignting and de signing a kind of ga s sen sor app lying to oilstoreroo m . The sen sor element i s t he ZnO t hin film dop ed Al , p rep ared by t he sp ut t ering dep o sition met ho d wit h DC magnet ron on alumina t ube a s sub st rat e . The t hin film ha s wonderf ul sen sitivit y and short re sp on se (recover) time to t he ga solene vapor . When t he concent ration of t he ga s i s much high ( 1 %) ,t he change of outp ut signal s i s al so much bigger t han ot her ga s element s. Thi s ga s sen sor adop t ed t he chip MA X197 w hich can collect analo g signal s f ro m many sen sor element s and t ran sfor m t hem into digit al signal s in 12 bit p reci sio n . The sen sor can t ran smit an d receive t he dat a by wirele ss u sing t he F05C ,J 04 E mo dule s. Connecting t he L CD mo dule A CM 12864 ,t he sen sor sy st em make s t he di sp lay clearand ea sy . Key words :ZnO t hin film ;highp reci sio n A/ D co nver sion ; wirele ss dat a t ran sfer s ;L CD EEACC :7230L 用于油库安全监测的气体传感器研究与设计 程东升 ,袁育杰 ,孙以材 ,潘国锋 (河北工业大学信息工程学院 ,天津 300 13