金属铀表面磁控溅射CrNx薄膜的制备和腐蚀性能.pdfVIP

The 6th China Corrosion Conference Preparation and Corrosion Resistance of Crn Film x Prepared by Unbalanced Magnetron Sputtering on the Surface of Depleted Uranium 1 2 1 1 1 1 1 Shengfa ZHU , Tianwei LIU , Yanping WU , He HUANG , Fan JIANG , Kai TANG , Qiang WEI 1China Academy of Engineering and Physics, Mianyang 621900, PR China 2Science and Technology on Surface Physics and Chemistry Laboratory, Mianyang 621907, PR China Abstract: The chemical nature of depleted uranium is very active and prone to oxidation corrosion in nature environment. In this study, CrNx film was prepared on the surface of depleted uranium by unbalance magne- tron sputtering ion plating to improve its corrosion resistance. The X-ray photoelectron spectroscopy (XPS) was used to characterize the chemical state and depth profiles of Cr, N and O elements. X-ray diffraction (XRD) was employed to examine the phase structure of CrNx film. The corrosion behavior of the samples was measured by using polarization curves (E/I). The results showed that, CrNx film prepared by unbalance magnetron sputtering had good density and corrosion resistance. The phase composition of CrNx films was composed with Cr, CrN and Cr N when the N flow was lower. After a layer of CrN was deposited on the 2 2 x surface of uranium, the corrosion potential significantly improved, while the corrosion current density de- creased. It was indicated that, after depositing CrNx thin film by unbalance magnetron sputtering, the corro- sion resistance of depleted uranium was effectively improved. Keywords: Delepted uraniu