多孔硅基微型直接甲醇燃料电池用催化电极的制备.pdfVIP

第19 卷 第5 期 传 感 技 术 学 报 V ol. 19 No. 5 2006 年10 月 CHINESE JOURNAL OF SENSORS AND ACT UATORS Oct . 2006 Preparation of PorousSiliconBased Electrocatalytic Electrodes for Micro Direct Methanol Fuel Cell * L I UX iaow ei , S UO Chunguang , ZH A N G Yuf eng , ZH A N G Bo, H UZex ian (MEM S Center , H ar in I nstitute of T ech nology , H ar in 15000 1, China) Abstract:In order to f urther miniaturize t he siliconbased micro direct met hanol fuel cell ( DM FC) a novel meth od of fabricating electrocat alytic electrodes w ere introduced. A porous silicon ( PS) layer is formed by anodic etch ing in a H Fethanol solution w hich is considered an effective and cheap fabricat ion method. T he anodic and cat hodal catalyst layer w ere formed using electroless plat ing platinum or platinum and ruthenium ( PtRu) codepo sition over PS substrates. Catalyst being deposited on PS brings threedimen sional feat ures and the nonplanar in t erfaces for the catalytic elect rodes w ill increase t he active surf ace area w ithin a st ated volume. A ddit ionally as high as 95% the utilizat ion ratio of noble metal in electroless plat ing solut ion leads economizing platinum and ru t henium. SEM XRD EDX w ere employed t o analysis the PS and catalyst layer . Key words: micro dir ect met hanol fu el cel l; po rou s silicon ; elect rocataly tic elect rode; elect ro les s plat ing EEACC:84 0G * 刘晓为 索春光 张宇峰 张 博 胡泽先 ( M E M S 150001) : . 95 %