反置结构ZnO微米级圆晶的制备和性能研究.pdfVIP

·80· 材料导报B：研究篇 反置结构ZnO微米级圆晶的制备和性能研究’ 王古平，付亚波，李志刚，刘彦平 (台州学院物理与电子工程学院，台州318000) 摘要 利用全自动化功能磁控溅射技术在硅／PS(聚苯乙烯)胶体球模板上制备了具有室温铁磁性和紫外发光 上采用略有不同工艺制备的六边形和反置六边形结构ZnO微米级圆晶均具有(002)择优取向，晶粒大小分别为21．7 i31TI和26．5rllTl，应力分别为3．26×109Pa和一1．21×109Pa，均出现361nnl和444Din两个发光峰。两种结构Zno 阵列的铁磁性有所不同，可能是缺陷不同引起的。 关键词 磁控溅射氧化锌倒置结构光致发光室温铁磁性 中图分类号：TN383文献标识码：A DOI：10．11896／j．issn．1005—023X．2014．20．019 FabricationandPerformancesofInvertedStructureZn0MicroDie WANG Yabo，LI Guping，FU Zhigang，LIUYanping of andElectronics 318000) Physics (College Engineering，TaizhouUniversity，Taizhou AbstractTwokinds0{invertedstructureszincoxidemicrodieswithbothRT andultraviolet ferromagnetism on RF luminescencewerefabricated colloidal full-auto Si／polystyrenetemplatesby magnetronsputteringtechnology． TheZnO werecharacterized andVSM．Theresultsshowsthat structureand samples bySEM，XRD，PL hexagonal inverted structureZnOmicrodieswith(002)orientationwereobtaineddifferent in hexagonal by processespolystyrene nrn size was21．7 and26．5nlTl，whilethestresswas3．26×109Paand一1．21×109Pa etching，grainof(002)plane 361nn2and444niTlluminescence inthetwo respectively．Meanwhile，about peaksappeared samples．Theferromag— netic aredifferentinthetwo structureZnOmicrodies，this owestOthe variance． properties types perhaps deficiency words Key magnetronsputtering，ZnO，inverted