Experimental Research of DLC Film Deposited by Filtered Vacuum Arc Evaporation.pdfVIP

Journal of South east University( Engli sh Edition) 　　June 　1999 　Vol . 15　No . 1　 ISSN 1003— 985 Exp erimental Re sea rch of DLC Film Deposit ed by Filtered Vacuum Arc Evaporation 1 2 2 3 Zhu Jijun 　Zuo Denwen 　Wang Min 　 La Peiqing 1 ( National Laboratory of Molecular and Biomolecular Electronics, Southeast University , Nanjing 210096) 2 ( Department of Mechanical Engineering , Nanjing University of Aeronautics Astronaut ics, Nanjing 210016) 3 ( Lanzhou Institute of Physics Chemi stry , Open Laboratory of Lubrication , Lanzhou 30000) Ab str act : 　Diamon d- like carbon ( DLC) films was grown su ccessfully on silicon , titanium and high speed steel ( HSS) substrate at low temperature in a filtered vacuum arc deposition syst em . Arc di sch arges were establi shed on a graphit e cathode in this home- built syst em with a toridal macroparticles filter . Ion current convected by the p lasma beam was measured with a negatively biased probe . It was shown th at the magnetic field of the coils lo- cat ed on the plasma duct has a strong influence on ion current . Scanning electron microscope ( SEM) , atomic force microscope ( AFM) and Raman spectrum are u sed to study the DLC films . Tribological b ehaviors of the deposit ed film are al so studied . Key wor ds : 　diamond like carbon thin film , filtered vacuum arc deposition , atomic force microscope Extensive potential application s of diamond an d diamond- like carbon thin films have att racted worldwide attention during recent years . The