A Practicl Implementation Of Silicon Microchannel Coolers.docVIP

A Practical Implementation Of Silicon Microchannel Coolers Evan G. Colgan, R. J. Bezama, Michael Gaynes and Kenneth C. MarstonIBM Corporation IntroductionMore than twenty-five years ago, Tuckerman and Pease first described the use of silicon microchannel cooling for very high power densities [1]. However, the coolers could not be fabricated easily and pressure drops were very high. As chip power densities are now increasing beyond air cooling limits, a variety of liquid cooling methods are being investigated. Due to the high heat transfer coefficient associated with it, microchannel cooling