微机电系统在仿生学生学上的应用研讨.docVIP

Design,and preliminary characterization of a novel MEMS bionic vector hydrophone Hua Mingya (School of mechanical engineering and automation Shanghai University, Shanghai 200072, China) Abstract: According to the?principle of?the fish?lateral line organ?of hearing,?a novel microelectromechanical systems?(MEMS)?bionic vector hydrophone?used for obtaining vector?information of underwater sound field?is introduced.?It is desirable that?the application of MEMS?piezoresistive effect?and bionic?structure can improve the?low frequency?sensitivity?of vector hydrophone?and?its miniaturization?based on.?Bionic?structure is composed of two parts: high precision?four?beam structure and the?rigid?plastic?barrel is fixed on?themicrostructure of the?center.?Hair cells?located in the?lateral?line?varistors?beamsimulation?and?rigid plastic cylindrical?simulation?cilia.?When the plastic?tube?is by voice,?strain?varistor?to transform the?differential voltage?output?signal through the?Wheastone bridge?circuit.?Microfabrication techniques have been?used to measure?tissue?results?made. Keywords: MEMS; Bionic; Vector hydrophone; Low frequency The characteristics of MEMS Miniature: MEMS devices?has the advantages of small volume,?light weight,?low energy consumption,?small inertia,?high resonance frequency,?short response time. Silicon as the main?material,?mechanical and electrical?properties of?silicon?fine:strength,?hardness and Youngs modulus?and?density of?iron,?like aluminum,?heat conduction?rate?close to the?molybdenum and tungsten. Mass production:?micro machining?with?silicon?also?making?hundreds of?microelectromechanical?device or a?complete MEMS?in?a piece of silicon?technology.Mass production?can greatly reduce the production?cost. Integration:?can take?different functions and?sensitive?direction or the?actuating direction?of multiple?sensors or actuators?are integrated,?or?the formation of microsensor array,?micro actuator?array,?even to the?device?of multiple