FabricationtechnologyofpiezoresistiveconductivePDMSfor.pptVIP

Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors IEEE MEMS 2007 Miao Lu, Amine Bermak, Yi-Kuen Lee Outline Introduction Material characterization Device fabrication Device characterization Conclusion Introduction With the progress of computer and internet, our life become more convenient and comfortable. But it is also convenient for hackers. Though, how to keep personal privacy is very important. Introduction (cont.) Material characterization Coductive PDMS (CPDMS): Mixture of PDMS and carbon black Device fabrication 1. Sputter Ti/W and Au elect