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Fluid Components for Small, Smart, Sampling Systems Kevin Mracek Agenda Requirements for Fluid Components used in Small, Smart Systems Components Currently Available Diaphragm Valves T2 Series Face Seal Fitting Weld Fittings Regulators Integrated Gas Components Requirements for Fluid Components used in Small, Smart Systems Smaller/More Compact Cleaner (Accuracy) More Reliable Easily Automated Modular Diaphragm Valves Features/Benefits Small Surface Area High Reliability No Packing to Contaminate System Fluid Low Internal Volume T2 SERIESPNEUMATICALLY ACTUATED VALVES T2B1Three Module Network Features/Benefits No Cross Contamination Reliable Valve Function No Dead Volume Compact Design Low Internal Volume Ease of Installation VCR? Features/Benefits All-metal seals Eliminate crevices around tubing Low Dead Volume Zero Clearance Component Removal Optional Ultra-High-Purity “S” Type VCR? Features/Benefits Boreline Seal: Reduces entrapment zones Anti-Twist Design All the features of the standard VCR ? MICRO-FIT? Features/Benefits Compact Design Allows Close Component Spacing for tubing systems Automatic Tube Welding Smooth Surface Transitions Eliminates Crevices Around Tubing  Features/Benefits Half the Size of Conventional Regulators Low Supply-Pressure Effect Low Droop High Purity Design igc-I Components: Simple System Integration Features/Benefits Modular Design Easy Replacement of Valves Smaller Footprint All Metal Seals to Atmosphere Variety of Surface-Mount Components Available Ultra High Purity igc -II * Common Bleed / vent Common Outlet Inlet Inlet Inlet Common Outlet Open Closed R L-15 HF Regulator Manifold layer Substrate layer Surface mount layer Bridge Block 1) The all metal seal of the VCR? connection offers high purity and excellent corrosion resistance with minimal out-gassing compared to elastomeric seals, providing leak-free services from critical vacuum to positive pressure. Components: glands gasket nuts 2) The seal of the VCR? assembly i