2001juneftirbpteosb%measurementinterfabcorrelationreport.docVIP

The New Methodology Evaluation of Background Source for FTIR Alignment. 1. Abstract 1 2. Experiment Design 2 3. Wafer Preparation 4 4. Alignment Schedule 4 5. Alignment Result Raw Data 6 6. Wafer Stability 7 7. Result Analysis - Alignment Status 8 8. Background Value Source Evaluation 11 9. ICP MS Analysis Result 12 10. FTIR B% Inter fab Alignment Methodology 13 11. Conclusion  The New Methodology Evaluation of Background Source for FTIR Alignment. Y.W. Hsu Jacky Huang Taiwan Semiconductor Manufacturing Company, Ltd. 1.Abstraction FTIR (Fourier Transform Infrared Spectrom