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Sample preparation by focused ion beam micromachining for transmission electron microscopy imaging in front-view.pdf

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Sample preparation by focused ion beam micromachining for transmission electron microscopy imaging in front-view.pdf

Micron 56 (2014) 63–67 Contents lists available at ScienceDirect Micron journal homepage: /locate/micron Sample preparation by focused ion beam micromachining for transmission electron microscopy imaging in front-view Michael Jublot a,?, Michael Texier b a CP2M, Aix Marseille Université, av. Escadrille Normandie Niémen, F13397 Marseille, France b Aix Marseille Université, CNRS, IM2NP UMR 7334, av. Escadrille Normandie Niémen, F13397 Marseille, France article info Article history: Received 2 August 2013 Received in revised form 9 October 2013 Accepted 9 October 2013 Keywords: TEM FIB Damaging Lamella Front-view abstract This article deals with the development of an original sample preparation method for transmission electron microscopy (TEM) using focused ion beam (FIB) micromachining. The described method rests on the use of a removable protective shield to prevent the damaging of the sample surface during the FIB lamellae micromachining. It enables the production of thin TEM specimens that are suitable for plan view TEM imaging and analysis of the sample surface, without the deposition of a capping layer. This method is applied to an indented silicon carbide sample for which TEM analyses are presented to illustrate the potentiality of this sample preparation method. ? 2013 Elsevier Ltd. All rights reserved. 1. Introduction Analyses by transmission electron microscopy (TEM) are performed on thin specimens transparent to electrons. This implies in most cases to carry out a sample preparation prior to the specimen observation. The care paid to this crucial step directly affects the results obtained by TEM analysis. Numerous methods were developed and adapted depending on the nature of the material and on the required information (Thompson-Russel and Edington, 1977). For analyzing self-supporting specimens, observations are mostly achieved in cross-section, i.e. the electron beam being parallel to the sample surface (Bravman and Sinclair, 1984). This con?guration is no