新型高灵敏度低功耗的磁场传感器设计与模拟.pdf

第19卷第5期 传感技术学报 V01．19No．5 CHINESE OFSENSORSANDACTUATORS 2006年10月 JOURNAL Oct．2006 of with andLowPower aNovel High Modeling MagnetometerSensitivity Yue-linl3 LJL，Yu-feil弘，ZHAOBen-gan91”，WUYa-min91，WANG 1．State Transducer of technology， KeyLaboratoryof Technology，NationalKeyLaboratoryMicrosystem Institute and 200050，China Shanghai ofMicrosystemInformationTechnology，ChineseAcademyofSciences，Shanghai 2．GraduateSchooltheChinese 100039，China； of AcademyofSciences，Beijing 3．Zhejiang 310027，China) University，Hangzhou novel was MEMStorsionalsensitive Abstract：AMOEMS structure， magnetometerintroduced，including filmand about and detectofthedevicewasdiscussed detection．The magnetic optical theorysensingoptical 1．The of withANSYSand ofthedevicewereshowed． designstructure。analysis Matlab，optimization The ofthedevicewassimulatedand showsthat insertion10SS can performance analyzed．It optical signal bereceiveddualfibercollimatorandPIN．the induction60nTcouldbedetectedandthesensi- by magnetic wouldbebetterthan tivity 0．6dB／T． collimator micro-mirror；dual-fiber Keywords：MOEMS；magnetometer；torsional EEACC：2560B；3120N 新型高灵敏度低功耗的磁场传感器设计与模拟 刘玉菲1’弘，赵本刚1’2，吴亚明1，王跃林1’3 I．中国科学院研究生院，北京