集成微流体测控芯片的研制.pdfVIP

第19卷第5期 传感技术学报 V01．19 No．5 2006年10月 CHINESE JOURNAL OF SENSORS AND ACTUATORS Oct．2006 Research on the Integrated Micro-Fluidic Chip LIUXiao-wei。，WANG Wei，TIAN Li，FU Jian—qi，CHEN Xia-jie，NI He-nan，ZENG Juan (MEMS center，Harbin Institute of Technology，Harbin 150001，China) Abstract：The micro-fluidic chip with the micro-pump，micro channel，the micro flow flux sensor and the temperature sensor are designed and fabricated．With the finite element analysis software ANSYS，the heat transfer efficiency of the micro channel on the chip in the cooling system are simulated and analyzed． Then the structure of