Glancing angle deposited ITO films for efficiency.pdfVIP

Glancing angle deposited ITO films for efficiency enhancement of a-Si:H/μc-Si:H tandem thin film solar cells Jung Woo Leem and Jae Su Yu* Department of Electronics and Radio Engineering, Kyung Hee University, 1 Seocheon-dong, Giheung-gu, Yongin-si, Gyeonggi-do 446-701, Korea *jsyu@khu.ac.kr Abstract: Indium tin oxide (ITO) thin films with relatively high transparency and low absorption are prepared by glancing angle deposition (GLAD) method and their effect on the device performance of a-Si:H/μc- Si:H tandem thin film solar cells is theoretically investigated by applying the experime