基于波导管的无缝扫描光刻激光均束设计.pdfVIP

第35卷第4期 2009 年 7 月 或非执* OPTICAL TECHNIQUE Vol. 35 No.4 July 2ω9 文章编号: 1002-1582(2009)04-0615-03 基于波导管的无缝扫描光刻激光均束设计. 裴文彦1 ，用金~2，梁罔均2，林清华2 (1.广东工业大学实验教学部，广州 51ω06; 2. 广东工业大学物理与光电工程学院，广州 510006) 摘 要: 351nm 波长的准分子激光器由光波等管作为激光均束器，直接输出正六角形均匀分布的照明光束，能在大 面积激光投影光刻中实现无缘扫描。间目前常用的微透镜阵刑器相比制作简单，无须光阑就能直接获取所需要的六角 形光束，减少了能最损失。通过合理的假设和理论推算，依据管内最大反射次数就能适当地施取光被导智的长度，既保 证了足够的反射次数以维持良好的均匀性，问时又避免了不必要的管长所带来的更多反射损髓。利用 ZEMAX 光学设 计软件模拟和分析了由光披导管输出的照明光。结果表明，输出的六角形光束的相对光通盘为 96% ，近似于平1页的能 量分布，是现出了极好的均匀傲。 关键诩:准分子激光器;均柬器;光榄导智;光刻;无键扫描;光学设计 中阁分类4号 :τN248 j TN249 文献标识码:A Design of laser beam unifonnity based 00 Iight-guide wall in seamless scaoniog Iithography PEI Wen-yan 1 , ZHOU Jin-yu时， LlAl斗GQJo田jurr ， Lin Qing-hua2 (1. Experimental Teaching Center, Guangdong University of Technol，咱y. G咄ngzl酬 510006. China) (2. School of Physics 向阳:lectronic Engin创叫咱. Guangdong University of Technol，句w.Gωngzl削 51ω06. China) Abstract: For 351nm excimer suited forωnventional pho阳esists ex阳山巴， light-guide wall used for la阳 beam hom:耶- nizer directly outputs an illur回nated hexagonal b凶m appeared as unifonnity wruch ωn achieve 础npletely 况aml耐优创ming lithography in the lar伊are租阳erp叫ection system. This hcm哺enizer can be made more simply and easily than microlens 缸 rays most in u.se. M删lwhile ， wíth I10 diaphragm, the desir时 hexagonallight bean1 ωn be directly obtained in order to reduce m吨y1唰. Bym础15 of reasonable hyt:泊thesis and th酬咄咄 calculation. the length of light-guide wall can be pro阳ly cl酬en by the maximurn reflective nurnber of times in the tube. It can be ensured that eI10ugh refl配tive nurnber of tir丑陋 keeps a ~仅对 unifonnity. It can be a1so avoid时 thatωmecessary length of tube leadsωmuch reflective 1耐. The output illuminatíon of the light guide wall is simulated and analyzed by using ZEMAX optical design software. The rE恐ults show that the relative 让radianc晴 。，f output hexagonal light be刷 r创chω96% ， and the nearly f!at-top intensíty profile den10nstrates very 以对 unifonnity. Key words: 巳xcimer; beam 00