滚型纳米压印模具变形机理的研究.pdfVIP

第 51 卷第 7 期 机 械 工 程 学 报 Vol.51 No.7 2015 年 4 月 JOURNAL OF MECHANICAL ENGINEERING Apr. 2015 DOI ：10.3901/JME.2015.07.155 滚型纳米压印模具变形机理的研究* 1, 2 1 1 1 2 兰红波 徐方超 李增辉 梁 森 丁玉成 (1. 青岛理工大学纳米制造与纳光电子实验室 青岛 266033 ； 2. 西安交通大学机械制造系统工程国家重点实验室 西安 710049) 摘要：滚型纳米压印是一种高效、低成本批量化制造大面积微纳米结构的方法，已经被看成是最具有工业化应用前景的微纳 米制造方法之一，同时也被认为是实现纳米压印技术从实验室到工业化应用的一个重要突破口。开展滚型纳米压印过程中模 具变形机理和规律的研究，提出滚型纳米压印两种理论模型，揭示柔性接触滚轮模具变形的机理、规律和主要影响因素，阐 述硬质接触和柔性接触两种压印方式显著区别和特点。该研究为探索减小弹性滚轮模具变形策略和方法，滚型纳米压印工艺 要素的优化，以及提高滚型纳米压印复型精度和压印效率奠定了理论基础。 关键词：纳米压印；模具变形；滚轮模具；柔性接触；纳米制造 中图分类号：TN305 Mold Deformation in Roller-type Nanoimprint Lithography LAN Hongbo1, 2 XU Fangchao1 LI Zenghui1 LIANG Sen1 DING Yucheng2 (1. Nanomanufacturing and Nano-Optoelectronics Lab, Qingdao Technological University, Qingdao 266033; 2. State Key Laboratory for Manufacturing System Engineering, Xi’an Jiao Tong University, Xi’an 710049) Abstract ：Roller-type nanoimprint lithography (NIL) is an emerging large-area nanopatterning method with high throughput, low cost and high resolution. It has been considered as a promising candidate for extremely low-cost mass production of micro/nanostructures and become the most potential manufacturing method for industrialization of nanoimprinting technology. The rolled mold deformation of roller-type NIL is investigated. Two theoretical models are proposed. Furthermore, the mechanism and influence factors of the roller mold deformation are revealed by theoretical analyses and numerical simulations. Some significant conclusions have been achieved. These findings are valuable in reducing mold deformation, optimizing imp