Analysis for Pull-In Voltage of a Multilayered Micro-Bridge Driven by Electrostatic Force英文文献资料.docVIP

Engineering, 2010, 2, 55-59 55 doi:10.4236/eng.2010.21007 Published Online January 2010 (http://www.SciRP.org/journal/eng/). Analysis for Pull-In Voltage of a Multilayered Micro-Bridge Driven by Electrostatic Force 1,2,3 1,2,3 1,2,3 Yu LIU , Guochao WANG , Hongyun YANG 1 Automobile College, Chongqing University of Technology, Chongqing, China Key Laboratory of Automobile Parts Test Technique in Chongqing, Chongqing, China 2 3 Chongqing Engineering Research Center for Automobile Power System and Control, Chongqing, China Email: liuyu_cq@126.com Received August 8, 2009; revised September 4, 2009; accepted September 12, 2009 Abstract A trial solution for bending deflection of a multilayered micro-bridge subject to a voltage induced load is presented. The relation between the applied voltage and the displacements of the micro-bridge in the pull-in state is analyzed by energy method. Furthermore, two analytical expressions about normalized displacement and pull-in voltage are carried out. It’s proved that the value of normalized displacement is not influenced by residual stress if axial and shear deformation is ignored. Finally, the theoretical results are compared with that of FEM, and they show good agreement. Keywords: MEMS, Electrostatic Actuation, Multilayered Micro-Bridge, Trial Solution, Energy Method, Pull-In Voltage 1. Introduction Although many people study the pull-in phenomena of the monolayered micro-bridge structure driven by elec- trostatic force, and get some valuable conclusions, they, however, cannot be applied to the multilayered micro- bridge structure. So some people [7] devote themselves to research on the pull-in phenomena of the multilayered micro-bridge structure. Whereas the analytical expres- sion is complicated, this depends on the introduction of the assumptions and the form of the trial solution.