Optimal Design and Operation for a No-Moving-Parts-Valve (NMPV) Micro-Pump with a Diffuser Width of 500 μm 英文参考文献.docVIP

Sensors 2009, 9, 3666-3678; doi:10.3390/OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Optimal Design and Operation for a No-Moving-Parts-Valve (NMPV) Micro-Pump with a Diffuser Width of 500 ?m Chin-Tsan Wang 1,*, Tzong-Shyng Leu 2 and Jia-Ming Sun 2 1 Department of Mechanical and Electro-Mechanical Engineering, National I Lan University / 1, Sec. 1, Shen-Lung Road, I-Lan, 26047, Taiwan 2 Department of Aeronautics and Astronautics, National Cheng Kung University / 1, Ta-Hsueh Road, Tainan 70101, Taiwan; E-Mails: tsleu@.tw; s0925.jms@ * Author to whom correspondence should be addressed; E-Mail: ctwang@.tw; Tel.: +886-3- 9357400, ext 686; Fax: +886-3-9311326 Received: 28 March 2009; in revised form: 28 April 2009 / Accepted: 15 May 2009 / Published: 15 May 2009 Abstract: A no-moving-parts-valve (NMPV) with a diffuser width of D = 500 microns was investigated in this study by numerical simulations at Reynolds numbers, ReD, ranging from 20 to 75, and expansion valve angles ranging from 30° θ1 57° and 110° θ2 120°. The D p,i value, 1.02 D p,i 1.14, is larger within the proposed range of the expansion valve angles. A flow channel structure with a depth of 500 micron is manufactured using yellow light lithography in this study. From prior analyses and experiments, it is found that piezoelectric films work better at a buzz driving frequency of f 30Hz and the best operating frequency is at a driving frequency of f = 10Hz because it produces the largest net flow. In addition, the expansion angles θ1 = 30° and θ2 = 120° are the best expansion angles because they produce the largest net flow. These related results are very helpful for the actual design of no-moving-parts-valve micro-pump. Keywords: no-moving-parts-valve (NMPV); expansion valve angle; net flow  Sensors 2009, 9 3667 1. Introduction In order to satisfy requirements in biomedical sample applications o