SU-8 Guiding Layer for Love Wave Devices 英文参考文献.docVIP

Sensors 2007, 7, 2539-2547 sensors ISSN 1424-8220 ? 2007 by MDPI /sensors Full Paper SU-8 Guiding Layer for Love Wave Devices Paul Roach*, Shaun Atherton, Nicola Doy, Glen McHale and Michael I. Newton School of Science and Technology, Nottingham Trent University, Clifton Campus, Nottingham. NG11 8NS. United Kingdom * Author to whom correspondence should be addressed; Email: Paul.Roach@ntu.ac.uk; Tel: +44(0)115-848-8062; Fax: +44(0)115-848-6616 Received: 1 October 2007 / Accepted: 31 October 2007 / Published: 1 November 2007 Abstract: SU-8 is a technologically important photoresist used extensively for the fabrication of microfluidics and MEMS, allowing high aspect ratio structures to be produced. In this work we report the use of SU-8 as a Love wave sensor guiding layer which allows the possibility of integrating a guiding layer with flow cell during fabrication. Devices were fabricated on ST-cut quartz substrates with a single-single finger design such that a surface skimming bulk wave (SSBW) at 97.4 MHz was excited. SU-8 polymer layers were successively built up by spin coating and spectra recorded at each stage; showing a frequency decrease with increasing guiding layer thickness. The insertion loss and frequency dependence as a function of guiding layer thickness was investigated over the first Love wave mode. Mass loading sensitivity of the resultant Love wave devices was investigated by deposition of multiple gold layers. Liquid sensing using these devices was also demonstrated; water-glycerol mixtures were used to demonstrate sensing of density- viscosity and the physical adsorption and removal of protein was also assessed using albumin and fibrinogen as model proteins. Keywords: Love wave, SU-8, SU-8 guiding layer, SH-SAW 1. Introduction Surface acoustic wave (SAW) devices are widely used in sensing applications with a number of variants