A Standard CMOS Humidity Sensor without Post-Processing.docVIP

Sensors 2011, 11, 6197-6202; doi:10.3390/s110606197 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A Standard CMOS Humidity Sensor without Post-Processing Oleg Nizhnik *, Kohei Higuchi and Kazusuke Maenaka Maenaka Human-sensing Fusion Project, 8111, Shosha 2167, Himeji-shi, 671-2280 Hyogo-ken, Japan; E-Mails: higuchi@eratokm.jp (K.H.); maenaka@eng.u-hyogo.ac.jp (K.M.) * Author to whom correspondence should be addressed; E-Mail: oleg@eratokm.jp; Tel.: +81-079-267-6019; Fax: +81-079-229-9021. Received: 20 April 2011; in revised form: 1 June 2011 / Accepted: 3 June 2011 / Publis