Fabrication and Characterization of a Ruthenium Nitride Membrane for Electrochemical pH Sensors.docVIP
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Fabrication and Characterization of a Ruthenium Nitride Membrane for Electrochemical pH Sensors
Sensors 2009, 9, 2478-2490; doi:10.3390/OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
Fabrication and Characterization of a Ruthenium Nitride
Membrane for Electrochemical pH Sensors
Yi-Hung Liao 1,2 and Jung-Chuan Chou 1.3,
*
1
Graduate School of Engineering Science and Technology, National Yunlin University of Science
and Technology / 123, 3 sec. University, Douliou, Yunlin, Taiwan R.O.C.;
E-Mail: liaoih@.tw
2
3
Department of Information Management, Transworld of Institute of Technology / 1221, Jen-Nang
Rd., Chia-Tong Li, Douliou, Yunlin, Taiwan R.O.C.
Graduate School of Electronic Engineering, National Yunlin University of Science and
Technology/ 123, 3 sec. University, Douliou, Yunlin, Taiwan R.O.C.
* Author to whom correspondence should be addressed; E-Mail: choujc@.tw;
Tel.: 886-5-534-2601 ext. 2101; Fax: 886-5-532-1719
Received: 12 February 2009; in revised form: 27 March 2009 / Accepted: 31 March 2009/
Published: 9 April 2009
Abstract: The pH sensing and nonideal characteristics of a ruthenium nitride (RuN)
sensing membrane pH sensor were investigated. RuN thin films were deposited from a
99.9% ruthenium target on p-type silicon substrates using radio frequency (r.f.) sputtering
with N2 gas. Subsequently, the nanometric structure and surface morphology of RuN thin
films were determined. The sensitivity of the RuN sensing membrane pH sensor was 58.03
mV/pH, obtained from ID-VG curves with a current-voltage (I-V) measurement system in
standard buffer solutions from pH 1 to pH 13 at room temperature (25 ?C). Moreover, the
nonideal characteristics of the RuN sensing membrane, such as temperature coefficient,
drift with light influence, drift rate and hysteresis width, etc. were also investigated. Finally,
the sensing characteristics of the RuN membrane were compared with titanium nitride
(TiN), aluminum nitride (AlN) and silicon nitride (Si3N4) membranes.
Keywords: Ruthenium nitr
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