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Scripta mater. 44 (2001) 1191–1194 /locate/scriptamat ELECTRICAL PROPERTIES OF AMORPHOUS CARBON FILMS M. Doyama, A. Ichida, Y. Inoue, Y. Kogure, T. Nozaki and S. Yamada Teikyo University of Science and Technology, Uenohara, Yamanashi, 409-0193 Japan (Received August 21, 2000) (Accepted in revised form December 9, 2000) Abstract—Aromatic polyimide films, Upilex S partially carbonized between 700°C and 1000°C. Electrical conductivity is higher at higher temperatures. The electrical conductivity s could be expresses as s so exp ( E/kT), where k is the Boltzmann constant, t is the absolute measuring 1 1 1 temperature. so and E are found to be 4 10 m and 0.02eB, respectively. The experimental data show that the Hall coefficient R is negative, and this implies that the carriers are negatively charged, i.e. electrons. The specimens are n-type semiconductors. The carrier density is given by 1/(eR) and the mobility is is s/( e), where e is the absolute value of the electron charge and s is the electrical conductivity. Fitting the data, A exp ( E /T) and A exp (E /T). 1 1 2 2 E1 and E2 depend on carbonized temperature. The polyimide films are not completely carbonized but partially carbonized at 700°C. The partially carbonized polyimide is an n type donor. It is concluded that the “impurity level” lies about 0.36eV below the conduction band. © 2001 Acta Materialia Inc. Published by Elsevier Science