双靶磁控溅射共沉积v-c-co 薄膜的结构及力学性能.pdf

33 10 998 CHINESE JOURNAL OF VACUUM SCIENCE ANDTECHNOLOG 2013 10 V-C-Co 1, 2 1,2 1,2 1 2 1* 张晓娟 郭 军 李 朋 于晓华 黄 峰 詹肇麟 ( 1. 650093;2. 315201) Microstructures and Mechanical Properties of Co-Sputtered V-C-Co Coatings 1,2 1,2 1, 2 1 2 1* Zhang Xiaojuan ,Guo Jun ,Li Peng , u Xiaohua ,Huang Feng ,Zhan Zhaolin ( 1. School of Materials Science and Engineering, K unming University of Science and Technology , K unming 650093, China; 2. Ningbo nstitute of Materials Technology and Eng ineering , Chinese A cademy of Sciences , Ning bo 315201, China) Abstract TheV-C-Co coatings were deposited by magnetron co-sputtering of theV-C ceramic and Co targets,on Si ( 100) and Corning glass substrates.The impacts of the deposition conditionson themechanical properties were evaluated. TheV-C-Co coatings were characterized with X-ray diffraction, scanning electron microscopy, energy dispersive spec- troscopy,and conventionalmechanicalprobes.The results show that the Co content significantly affects themicrostructures and mechanical properties of the coatings.For instance,the amorphous Co inversely influenced the crystalline structures of the V-C-Co coating and reduced theV-C grain sizes.As the Co content increased,the plasticity increased sharply,accom- panied by a decrease of surface hardness.At a compromised Co content of 1119%(at) ,the hardness and plasticity index of coating were found to be 22 GPa and