MEMS原理-04半导体掺杂.pptVIP

Film Growth Kinetics Film Growth Kinetics Film Growth Kinetics CVD Working Principle TiC气相沉积装置 CVD Reaction Types Pyrolysis Reduction Oxidation Compound formation Disproportionation Reversible transfer CVD Reaction Types Pyrolysis Chemical decomposition or charge induced by heat 热裂解反应 CVD Reaction Types Reduction CVD Reaction Types Oxidation CVD Reaction Types Compound Formation CVD Reaction Types Disproportionation CVD Reaction Types Reversible Transfer CVD 的优点 (1)在中温和高温下,通过气态的初始化合物之间的气相化学 反应而沉积固体; (2)可以在大气压(常压)或者低于大气压下进行沉积,一般说 低压效果更好些; (3)采用等离子和激光辅助技术可以显著促进化学反应,使 沉积可在较低的温度