薄膜技术Xuhai Zhang 03Thin-Film Evaporation.pptVIP

Outline Introduction The Physics and Chemistry of Evaporation Film Thickness Uniformity and Purity Evaporation Hardware Evaporation Processes and Applications Conclusion * 3.1 ELECTRICALLY HEATED EVAPORATION SOURCES helical coils:for metals that wet tungsten readily conical baskets: poorly wetting materials Evaporation temperature: 2200K Tungsten Wire Sources 3.1 ELECTRICALLY HEATED EVAPORATION SOURCES Tungsten, tantalum, and molybdenum a variety of shapes including the dimpled strip, boat, canoe, and deep-folded configuration Refractory Metal Sheet Sources 3.1 ELECTRICALLY HEATED EVAPORATI