水平震荡机械研磨对酸性镀铜微观结构的影响 - ingenta connect.pdf

81 Effects of H orizontally Vibrating Mechanical Attrition on the Microstructure of Electrodeposition Cu Coatings 1 1 1 2 , , , ( 1 , 3300 3; 2 , 100083) 1 1 1 2 FENG Chang-jie , DU Nan , WANG Chun-xia , HE Ye-dong ( 1 Key Laboratory of Nondestructive T esting ( M inistry of Education) , School of M aterial Science and Engineering, Nanchang Hangkong University, Nanchang 3300 3, China; 2 Beijing Key Laboratory for Corrosion, Erosion and Surface Technology, U niversity of Science and T echnology Beijing, Beijing 100083, China) : , - ( MA) SEM, XRD AutoLab ( MAEE) 3. 5% NaCl( ) , (T EP) , MA TEP , T EP 1.0~ 4. 0H z , MAEE , 2. 0H z 3. 0H z , MA , MAEE , T CP MAEE : ; ; ; ; ; : T Q153 : A : 1001-4381( 2011) 0 -0081-0 Abstract: T he mechanical attrition ( MA) w as supplied in a traditional acid electroplating process of copper by the horizontal rolling and sliding of glass balls on the sample surface w ith a special vibrating frequency. T he effects of vibrating frequency on the microstructure, grain refinement, deposition rate, porosity, as w ell as corrosion resistance in 3. 5%( mass fraction) NaCl solution of the mechanical attrition enhanced electroplating( MAEE) w ere analyzed by SEM , XRD and AutoLab. The results show that, compared w ith the traditional electroplated( T EP) Cu coating, significant grain refine- ment, reduced porosity and enhanced cor