氮气氛热处理对CrAlSiN薄膜结构及磨耗行为之影响.PDFVIP

氮氣氛熱處理對CrAlSiN 薄膜結構及磨耗行為之影響 Effect of nitrogen atmosphere heat treatment on structure and wear behavior of CrAlSiN coatings 許正勳 彭俊豪 李鈺萍 張婷惟 C.H. Hsu, C.H. Peng, Y.P. Lee, T.W. Zhang 大同大學材料工程學系 摘 要 本研究先以陰極電弧沉積方式使用Cr 、AlSi 雙靶材及通入N2 反應氣體，以 合成CrAlSiN 薄膜於JIS SKD61 工具鋼基材上，再於氮氣氛圍下施於600oC-1h 熱處理，然後進行微結構(XRD 、SEM 、TEM)分析、奈米壓痕試驗及磨耗試驗， 以了解後熱處理對CrAlSiN 薄膜微結構、硬度及磨耗行為之影響。 實驗結果顯示原CrAlSiN 薄膜含有CrN 、AlN 結晶相及Si N 非晶質；經氮 3 4 氣氛圍熱處理後會新增Cr2N 相，此結果可提高薄膜硬度(26.4→42.0 GPa) ；此外， JIS SKD61 工具鋼經披覆CrAlSiN 薄膜可改善耐磨耗性，特別是有經後熱處理之 薄膜 ，其耐磨耗性的表現更佳。 關鍵詞：CrAlSiN 薄膜、後熱處理、微結構、硬度、耐磨耗 Abstract This study used the two targets, Cr metal and AlSi alloy, as well as N2 reactive gas to synthesize CrAlSiN film on JIS SKD 61 substrates via cathodic arc deposition, o and then the coatings were heat-treated at 600 C for 1 hour under N2 atmosphere. Microstructure analysis (XRD, SEM, and TEM), nano-indentation tests, and wear tests were all conduced for understanding the effects of heat treatment on microstructure, hardness, and wear behavior of CrAlSiN coatings. The experimental results showed that the CrAlSiN coatings obtained in the study, consisting of CrN, AlN crystalline phases, and Si N amorphous. A new phase of 3 4 Cr N was found in the coating structure after the post heat treatment, resulting in an 2 increase of coating hardness from 26.4 to 42.0 GPa. In addition, JIS SKD61 tool steel with the CrAlSiN coatings could improve wear resistance, particularly the coating after heat treatment