NiFeFeCo[FeCo]xO1-x多层膜的高频磁性能研究 Study On High Frequency Magnetic Properties of NiFeFeCo[FeCo]xO1-x Multilayers.pdfVIP

汪学锋，张怀武，陈栖洲，钟智勇 (电子科技大学电子薄膜与集成器件国家重点实验室，四川成都610054) 摘要：采用直流磁控溅射制备NiFe／FeCo／[FeCo]。Oh多层膜，并采用振动样品磁强计，四探针法和微带 终端短路微扰法分别对薄膜的磁特性、电阻率以及磁谱进行测量．研究结果表明，薄膜中[FeCo]，Oh层的加入 有效地降低了难易轴矫顽力，提高了薄膜的电阻率和共振频率．随着[FeCol。Ol一，层厚度的增加，电阻率可提高 到173“Q．cm左右，共振频率可达2．OGHz，有效地降低了薄膜涡流损耗，提高了薄膜的高频特性． 关键词：磁性多层薄膜；共振频率；高频磁J生能 中图分类号：0484．4+3 文献标识码：A 文章编号：1001．3830(2010)02．0025．04 On of StudyHighFrequencyMagneticProperties NiFe／FeCo／lFeCo]工01弋Multilayers WANG Huai-wu，CHENXi—zhou，ZHONG Xuc-feng，ZHANG Zhi-yong State ThinFilmsand KeyLaboratoryofElectronic IntegratedDevices,University ofElectronic and Science 61005tChina TechnologyofChina,Chengdu WgIe DC method．The Abstract：NiFe／FeCo／[FeCo]zOi—Jmultilayersdepositedby magnetmnsputtering ofthe and weremeasured magneticpropertiesmultilayerssuch鹤hysteresisloop，resistivitymagneticspectrum by methodandterminalshort-circuit magnetometer,four-probe perturbationmethod, vibricatingsample microstrip that resultsshowedwiththeaddition ofhardaxisand axisis respectively．The of[FeCo]rOl-xlayer,theeoereivity easy reducedandthe andresonance ofthe is the resistivity frequencymultilayersimpmved increasing effectively．With thicknessof ofthefiImreaches and reaches the【