电子轰击源内空间电荷对其性能的影响.pdfVIP

32 2 Vol. 32 No. 2 20 11 3 Journal of Chinese M ass Spectro met ry So ciety M ar. 20 11 黄 超, 赵学玒, 张建超, 汪 曣 ( , 300072) : , ( EI) , , , , ; , , : ; ; ; : O 657. 63 : A : 20 11) Influence of the Space Charge in Electron Impact Ion Source on Its Performance H UANG Chao, ZHAO Xuehong, ZHANG Jianchao, WANG Yan ( Colleg e of P r ec ision I ns tr ument and Op toelectr on ics E ng ineer ing , T ianj in Un iv ers ity , T ianj in 300072, China) Abstract: In the pr actical applicatio n, space charg e w ill be caused by the electro n beam in the electron im pact ion sour ce, the influence of w hich should not be ignored. T he passio n distribution of electric f ield in ion source w as achieved by the num er ical method, and the mov em ent of io ns in it w as also gotten. After that, w ith the use of the result fro m the cal culation, the influence of the space charge on the per for mance of ion source w as analy ed. Finally, an ex periment w as carried out to obtain the r elationship betw een em ission current of ion sour ce and the intensity of different ions. The r esult of this exper im ent verifies the calculation and analysis mentio ned abov e. Key words: electron im pact io n source; space char ge; performance; numerical m ethod ( EI) , EI [ 7] , , [ 12] , , EI , , , EI , EI , [ 36] , EI , EI , EI : : : ( 1981~ ) , ( ) , , , Email: h uan gchao@ tju . edu. cn : 玒( 1956~ ) , 男( 汉族) , 天津人, 副教授, 从事分析仪器研究Email: haox h@ tju. edu . cn 72