非球面在线检测的系统误差分离与修正-core.pdf

8 5 Vo.l 8 No. 5 2010 9 Nanotechnology and PrecisionEngineering Sep. 2010 郭隐彪, 郭 江, 柯晓龙, 朱永炉 (, 361005) : 为了解决非球面在线检测的系统误差问题, 针对系统误差产生的机理误差的数学模型分离方 以及补 偿方 进行了研究. 提出一种将空间误差投影到不同平面上进行分析从而解决测量系统误差的新方 并建立了各 系统误差的数学模型.根据最小二乘 的基本思想, 建立了基于标准球面的系统误差分离数学模型, 得到了各参数 的最小二乘估计值, 并利用误差修正模型进行了校正. 利用标准球面进行测量实验, 验证了该方 的有效性和精确 性. 实验结果表明所提出的解决测量系统误差的思路可行, 最终可使测量系统精度达到 1 m 数量级, 从而满足精 磨阶段在线检测的需要. : ; ; : TG76 : A : 1672-6030( 2010) 05-0416-06 System Error Separation andRevision forAsphericLens On-MachineMeasurement GUO Y in- iao, GUO Jiang, KE X iao-long, ZHU Y ong-lu ( School of Physics and M echanical and E lectrical Engineering, X iam en University, X iam en 361005, China) Abstract: For the system errors in aspheric lens on-mach inemeasurem ent, theirmechanism, mathem atic model, separation and compensation methodsw ere investigated. A new approach of projecting spatial er- rors onto different planes for elmi inating system errorsw as presented and the mathem aticmodels for sys- tem errorsw ere esta lished. Based on the principle of the least square method, system error separation model for standard lensw as set up and the least square estmi ations of the parametersw ere o tained and revised w ith error revision mode.l M easurement tests for standard lensw ere conducted to verify the effec- tiveness and precision of the proposedmethod. Test results indicate that the proposed approach is feasi le and the precision of the on-m ach ine measurement is up to 1m magnitude order, wh ich meets the re- qu irement of fine grinding. eywords: aspheric lens; on-mach ine measurem