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the effect of a multihollow cathode on the self-bias voltage of methane rf discharge used for a-ch depositionmultihollow阴极在自给偏压的影响电压的甲烷射频放电用于ch沉积
Journal of Modern Physics, 2011, 2, 954-957
doi:10.4236/jmp.2011.29113 Published Online September 2011 (http://www.SciRP.org/journal/jmp)
The Effect of a Multihollow Cathode on the Self-Bias
Voltage of Methane RF Discharge Used for
a-C:H Deposition
1 1 2
S. Djerourou , K. Henda , M. Djebli
1
Laboratoire des Plasmas , Centre de Développement des Technologies Avancées, Baba Hassen, Algiers, Algeria
2Laboratoire de Physique Théorique , Faculté de Physique, USTHB, Algiers, Algeria
E-mail : sdjerourou@cdta.dz
Received March 9, 2011; revised April 16, 2011; accepted April 28, 2011
Abstract
In this work we report the measurement of the self-bias voltage of radiofrequency (RF) capacitevely coupled
plasma, with a multihollow cathode and methane precursor, used for amorphous hydrogenated carbon (a-
C:H) thin film deposition. The plasma is produced in the incident power and pressure ranges between 20 -
300 W and 10 - 100 mTorr, respectively. It was found that the self-bias voltage V is a linear function of the
dc
square root of the incident power W . The relationship between the self-bias voltage and gas pressure P is
RF
established; this gives an empirical relation for P P . From this result, the pressure P corresponding to
0
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