原创力文档a micromachined capacitive pressure sensor using a cavity-less structure with bulk-metalelastomer layers and its wireless telemetry application一个玩具小汽车使用cavity-less电容式压力传感器结构与bulk-metalelastomer层及其无线遥测应用程序.pdfVIP
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a micromachined capacitive pressure sensor using a cavity-less structure with bulk-metalelastomer layers and its wireless telemetry application一个玩具小汽车使用cavity-less电容式压力传感器结构与bulk-metalelastomer层及其无线遥测应用程序
Sensors 2008, 8, 2317-2330
sensors
ISSN 1424-8220
© 2008 by MDPI
/sensors
Full Research Paper
A Micromachined Capacitive Pressure Sensor Using a
Cavity-Less Structure with Bulk-Metal/Elastomer Layers and
Its Wireless Telemetry Application
Kenichi Takahata 1,* and Yogesh B. Gianchandani 2
1 Department of Electrical and Computer Engineering, University of British Columbia, 2332 Main
Mall, Vancouver, BC V6T 1Z4, Canada; E-mail: takahata@ece.ubc.ca
2 Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal
Ave., Ann Arbor, MI 48109-2122, USA; E-mail: yogesh@
* Author to whom correspondence should be addressed.
Received: 31 December 2007 / Accepted: 31 March 2008 / Published: 2 April 2008
Abstract: This paper reports a micromachined capacitive pressure sensor intended for
applications that require mechanical robustness. The device is constructed with two
micromachined metal plates and an intermediate polymer layer that is soft enough to
deform in a target pressure range. The plates are formed of micromachined stainless steel
fabricated by batch-compatible micro-electro-discharge machining. A polyurethane room-
temperature-vulcanizing liquid rubber of 38-μm thickness is used as the deformable
material. This structure eliminates both the vacuum cavity and the associated lead transfer
challenges common to micromachined capacitive pressure sensors. For frequency-based
interrogation of
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