nanocrystalline sno2f thin films for liquid petroleum gas sensors纳米晶体为液化石油气sno2f薄膜传感器.pdfVIP

Sensors 2011, 11, 7127-7140; doi:10.3390/s110707127 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Nanocrystalline SnO :F Thin Films for Liquid Petroleum 2 Gas Sensors Sutichai Chaisitsak Department of Electronics, Faculty of Engineering, King Mongkut’sInstitute of Technology Ladkrabang, Bangkok 10520, Thailand; E-Mail: kcsutich@kmitl.ac.th; Tel.: +66-2-329-8344; Fax: +66-2-329-8346 Received: 30 May 2011; in revised form: 20 June 2011 / Accepted: 27 June 2011 / Published: 11 July 2011 Abstract: This paper reports the improvement in the sensing performance of nanocrystalline SnO -based liquid petroleum gas (LPG) sensors by doping with fluorine (F). Un-doped and 2 F-doped tin oxide films were prepared on glass substrates by the dip-coating technique using a layer-by-layer deposition cycle (alternating between dip-coating a thin layer followed by a drying in air after each new layer). The results showed that this technique is superior to the conventional technique for both improving the film thickness uniformity and film transparency. The effect of F concentration on the structural, surface morphological and LPG sensing properties of the SnO2 films was investigated. Atomic Force Microscopy (AFM) and X-ray diffraction pattern measurements showed that the obtained thin films are nanocrystalline SnO2 with nanoscale-textured surfaces. Gas sensing characteristics (sensor r