novel designs for application specific mems pressure sensors特定于应用程序的mems压力传感器的新设计.pdfVIP

Sensors 2010, 10, 9541-9563; doi:10.3390/s101109541 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Novel Designs for Application Specific MEMS Pressure Sensors Giulio Fragiacomo , Kasper Reck , Lasse Lorenzen and Erik V. Thomsen Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, DK-2800 Kgs. Lyngby, Denmark; E-Mails: lasse.lorenzen@nanotech.dtu.dk (L.L.); erik.v.thomsen@nanotech.dtu.dk (E.V.T.) Authors to whom correspondence should be addressed; E-Mail: giulio.fragiacomo@nanotech.dtu.dk (G.F.); Tel.: +45 4525 6316; Fax +45 4588 7762; E-Mail: kasper.reck@nanotech.dtu.dk (K.R.); Tel.: +45 4525 6311; Fax: +45 4588 7762. Received: 2 August 2010; in revised form: 25 September 2010 / Accepted: 20 October 2010 / Published: 28 October 2010 Abstract: In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0–350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications