photoacoustic techniques for trace gas sensing based on semiconductor laser sources光声技术基于半导体激光源的痕量气体检测.pdfVIP

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photoacoustic techniques for trace gas sensing based on semiconductor laser sources光声技术基于半导体激光源的痕量气体检测.pdf

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photoacoustic techniques for trace gas sensing based on semiconductor laser sources光声技术基于半导体激光源的痕量气体检测

Sensors 2009, 9, 9616-9628; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Review Photoacoustic Techniques for Trace Gas Sensing Based on Semiconductor Laser Sources Angela Elia *, Pietro Mario Lugarà, Cinzia Di Franco and Vincenzo Spagnolo 3 Laboratorio Regionale CNR-INFM “LIT ”, Dipartimento Interateneo di Fisica “M. Merlin”, Università and Politecnico of Bari, Bari, I-70126, Italy; E-Mails: lugara@fisica.uniba.it (P.M.L.); cinzia.difranco@fisica.uniba.it (C.D.F.); spagnolo@fisica.uniba.it (V.S.) * Author to whom correspondence should be addressed; E-Mail: angela.elia@fisica.uniba.it; Tel.: +39-080-544-2397; Fax: +39-080-544-2219. Received: 9 October 2009; in revised form: 19 November 2009 / Accepted: 23 November 2009 / Published: 2 December 2009 Abstract: The paper provides an overview on the use of photoacoustic sensors based on semiconductor laser sources for the detection of trace gases. We review the results obtained using standard, differential and quartz enhanced photoacoustic techniques. Keywords: gas sensing; photoacoustic spectroscopy; quartz enhanced photoacoustic spectroscopy 1. Introduction Photoacoustic spectroscopy (PAS) is a widely used method for trace gas detection. It is based on the photoacoustic (PA) effect, [ 1], i.e., the conversion of light to sound in all materials (solids, liquids and gases). Viengerov [2] used the PA technique for the first spectroscopic gas analysis in 1938; he studied blackbody infrared light a