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real-time particle mass spectrometry based on resonant micro strings基于谐振微弦实时粒子质谱
Sensors 2010, 10, 8092-8100; doi:10.3390/s100908092
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Communication
Real-Time Particle Mass Spectrometry Based on Resonant
Micro Strings
Silvan Schmid , Søren Dohn and Anja Boisen
Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech,
Building 345 East, DK-2800 Kongens Lyngby, Denmark; E-Mails: soren.dohn@nanotech.dtu.dk
(S.D.); anja.boisen@nanotech.dtu.dk (A.B.)
Author to whom correspondence should be addressed; E-Mail: silvan.schmid@nanotech.dtu.dk;
Tel: +45-452-557-32, Fax: +45-458-877-62.
Received: 10 July 2010; in revised form: 30 July 2010 / Accepted: 15 August 2010 /
Published: 27 August 2010
Abstract: Micro- and nanomechanical resonators are widely being used as mass sensors
due to their unprecedented mass sensitivity. We present a simple closed-form expression
which allows a fast and quantitative calculation of the position and mass of individual
particles placed on a micro or nano string by measuring the resonant frequency shifts of
the first two bending modes. The method has been tested by detecting the mass spectrum of
micro particles placed on a micro string. This method enables real-time mass spectrometry
necessary for applications such as personal monitoring devices for the assessment of the
exposure dose of airborne nanoparticles.
Keywords: mass spectrometry; MEMS; NEMS; nanoparticles; string resonator; micro
beads; aerosol; particle sensor
1. Introduction
In 1995 the use of re
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