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Sensors 2009, 9, 9805-9815; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article SAW RFID-Tags for Mass-Sensitive Detection of Humidity and Vapors Peter A. Lieberzeit 1, Christian Palfinger 1, Franz L. Dickert 1,* and Gerhard Fischerauer 2 1 Department of Analytical Chemistry and Food Chemistry, University of Vienna, Waehringer Strasse 38, A-1090 Vienna, Austria; E-Mails: Peter.Lieberzeit@univie.ac.at (P.A.L.); Christian.Palfinger@univie.ac.at (C.P.) 2 Chair of Measuring Technique and Control Engineering, Bayreuth University, Universitätsstraße 30, D-95440 Bayreuth, Germany; E-Mail: Gerhard.Fischerauer@uni-bayreuth.de * Author to whom correspondence should be addressed; E-Mail: Franz.Dickert@univie.ac.at; Tel.: +43-1-4277-52317; Fax: +43-2243-36273-15. Received: 26 October 2009; in revised form: 12 November 2009 / Accepted: 15 November 2009 / Published: 3 December 2009 Abstract: One-port surface acoustic wave (SAW) devices with defined reflector patterns give characteristic signal patterns in the time domain making them identifiable and leading to so-called RFID-Tags. Each sensor responds with a burst of signals, their timed positions giving the identification code, while the amplitudes can be related to the analyte concentration. This paper presents the first combination of such a transducer with chemically sensitive layer materials. These include crosslinked polyvinyl alcohol for determining relative humidity and tert-