激光精密加工领域的新前沿.docVIP

第 34 卷  第 5 期  中  国  激  光  Vol. 34, No. 5 2007 年 5 月 CH IN ESE JOU RNA L OF LA SERS May, 2007  文章编号: 02582 7025( 2007) 0520595228  综述  飞秒激光微加工: 激光精密加工领域的新前沿  何  飞, 程  亚 ( 中国科学院上海光学精密机械研究所强场 激光物理国家重点实验室, 上海 201800)  摘要  飞秒激光微加工技术具有加工精度高、热效应小、损伤阈值低以及能够实现 真正的三维 微结构加 工等优点, 这些 特性是传统的激光加工技术所无法取代的。首先回顾了激光微加工和超短脉 冲激光技术 的发展历 史, 然后 介 绍超短脉冲激光与金属和介质材料相互作用的机制, 接着阐 述了飞 秒激光直 写、干涉和 投影制备 等各种 加工方 法 的原 理, 重点讨论飞秒激光在三维光子器件集成、微流体芯片制备及其在生化传感 方面的应用 等, 最 后展望了飞 秒 激光微加工领域所面临的机遇和挑战, 指出了未 来的研究方向。 关键词 超快光学; 飞秒激光; 光与物质相互作用; 微加工 ; 集成光学; 双光子聚合; 微流体; 纳米颗粒 中图分类号 TN 249 文献标识码 A  Femtosecond Laser Micromachining: Frontier in Laser Precision Micromachining H E Fei, CH ENG Ya ( Sta te Key Labor a tory of H igh F ield Laser P hysics, S ha ng ha i I nstitute of Op tics and F ine Mecha nics, T he Chinese Academy of S ciences, Sha ng ha i 201800, China)  Abstr act  Femtoseond laser micr omachining enables fabrication of true thr ee2 dimensional ( 3D) m icrostr uctur es with high precision and low heat effect and damage threshold, showing unique advantages over the tr aditional laser micromachining technology. We f irst r eview the hist or ies of laser micropr ocessing and ult ra2 short pulse laser technology, and then outline the mechanisms of the inter act ions of ultr a2 short laser pulse with met als and transpar ent media. Next, we intr oduce several major technical appr oaches in the field of femtosecond laser micromachining such as femtosecond laser direct writing, mult i2 beam inter ference and projection patterning, as well as their applications in fabr ication of 3D int egrat ed opt ical devices, micr ofluidic chips, and chemical and biological sensor s, etc. Lastly, we highlight the opport unities and challenges in the field, and suggest some dir ections for the future r esear ch. Key words ult rafast optics; femtosecond laser ; light2 matter interaction; m icromachining; integr ated optics, two photon polymer ization; microfluidics; nanopar ticles  1  引 言  减小到几个