低频微幅振动的主动控制策略研究.pdfVIP

第八届全国振动理论及应用学术会议论文集，上海，2003 年 11 月 低频微幅振动的主动控制策略 汤炳新 （河海大学机电工程学院，江苏常州 213022） 摘 要： 为了满足微电子工业中的振动敏感设备对微幅低频振动的控制提出的更高的要求，主动振动控 制技术通常是必须的。该文就此提出了基于位移型压电作动器的前馈控制和反馈控制两种控制策略，并对它 们的实现问题进行了分析。分析表明，由于现有传感器的限制，前馈控制适合 0.2Hz 以上振动的隔离，而对 于 0.2Hz 以下的振动，可采用加速度反馈控制。为节约成本，一种由廉价地震检波器改造而成的容性加速度 传感器可被考虑。文中对基于现实考虑的控制方案进行了仿真，并对前馈控制进行了成功的实验。 关键词： 低频振动; 主动控制; 传感器 Strategies for active control of small low-frequency vibration Tang Bing-xin (Hohai University, College of Electrical and Mechanical Engineering, Changzhou Jiangsu 213022) Abstract: In order to meet the demands of vibration-sensitive equipments in micro-electronic industry in controlling small low-frequency vibration, it is recommended that the active control technique be adopted. Based on this idea, this paper put forward two vibration control schemes, the feedforward control and the feedback control, realized by the use of a displacement-type piezoelectric actuator. Some implementation problems were discussed and it is shown that due to the restriction from sensors, the feedforward scheme is only effective for vibration of 0.2 Hz above; for vibration of frequency less than 0.2Hz, the acceleration feedback scheme is recommended. To cut the cost, the capacitive acceleration meter made from a low-cost geophone can be considered. Simulations were carried out and a successful experiment was implemented for the feedforward scheme. key words: Low-frequency vibration; Active control; Sensor 作者简介：汤炳新（1966-），男，福建连城人，副教授，博士 1 1 前言 精密仪器和精密加工技术的发展对环境振动提出了更高的要求。例如，测试新型加速度传感器时需 要将大地运动引起的噪声与传感器本体噪声分离出来; 光学仪器的运行、半导体器件制造、化学机械抛光 (Chemical Mec