超精密定位系统宏动平台非平滑非线性动态模型辨识研究.pdf

th Proceedings of the 25 Chinese Control Conference 7-11 August, 2006, Harbin, Heilongjiang 超精密定位系统宏动平台非平滑非线性动态模型辨识 谭永红，雷兴华 桂林电子科技大学智能系统与工业控制研究所，桂林541004 E-mail: tany@gliet.edu.cn 摘 要: 本文介绍了超精密定位系统的宏动平台进给装置的构成，这是个具有库仑摩擦＋粘性摩擦这类非平滑非 线性的动态系统。为了建立该系统的模型，本文提出机理+参数辨识的混合模型辨识方法，该方法可以较方便地 确定模型结构，并确定非平滑非线性特性和线性部分的模型参数。实验取得了令人满意的效果。 关键词: 宏动平台，非平滑非线性，模型，辨识 Identification of Dynamic Model with Non-smooth Nonlinearity for Macro-moving Stage in Ultra-precision Positioning System Yonghong Tan, Xinhua Lei Guilin University of Electronic Technology, Guilin 5410040, China E-mail: tany@gliet.edu.cn Abstract: This paper presents the architecture of a macro-moving stage of an ultra-precision positioning system. This is a dynamic system with non-smooth nonlinearity such as stickiness and coulomb frictions. In order to model this system, a hybrid modeling approach with both first principles method and parameter-estimation technique is proposed in this paper. It is rather convenient to determine the structure of the model as well as the non-smooth nonlinear characteristic. Moreover, the parameter estimate for the linear part of the model can be specified as the non-smooth linearity is identified. The experimental results illustrate that the obtained method is promising. Key Words: Macro-moving stage, non-smooth nonlinearity, model, identification 过D/A转换并经差动放大后转换为±10v范围内的模 1 引言( Introduction) 拟电压输出用以作为电机驱动电源的电流设定输 入，电机驱动电源工作于电流闭环模式，以流经直 大行程两自由度精密工作台是指系统的运动范