毕业设计（论文）-基于光加热和光强探测光纤氢气传感器研究精选.docxVIP

武汉理工大学毕业设计（论文）基于光加热和光强探测光纤氢气传感器研究学院（系）：理学院专业班级：光信息科学与技术1201班学生姓名：指导教师：学位论文原创性声明本人郑重声明：所呈交的论文是本人在导师的指导下独立进行研究所取得的研究成果。除了文中特别加以标注引用的内容外，本论文不包括任何其他个人或集体已经发表或撰写的成果作品。本人完全意识到本声明的法律后果由本人承担。作者签名：年月日学位论文版权使用授权书本学位论文作者完全了解学校有关保障、使用学位论文的规定，同意学校保留并向有关学位论文管理部门或机构送交论文的复印件和电子版，允许论文被查阅和借阅。本人授权省级优秀学士论文评选机构将本学位论文的全部或部分内容编入有关数据进行检索，可以采用影印、缩印或扫描等复制手段保存和汇编本学位论文。本学位论文属于1、保密囗，在年解密后适用本授权书2、不保密囗。（请在以上相应方框内打“√”）（宋体小四号）作者签名：年月日导师签名：年月日摘要光纤光栅氢气传感器由于本质安全、抗电磁干扰、体积小等特点而被广泛关注，但是氢气敏感材料性能的优化和低浓度氢气检测灵敏度的提高等问题仍然亟待解决。本文从氢气敏感薄膜种类、厚度和工作温度以及测试环境气氛四个方面来研究敏感薄膜的氢敏性能，通过光信号处理模块观察光纤光栅反射光谱，将波长和强度相结合来研究不同氢气敏感薄膜的性能，主要性能参数为灵敏度、长期稳定性和重复性。实验结果显示300nm厚度的Pd/Ni薄膜在加热状态下，与氢气反应引起薄膜的物理性质变化较好，导致光栅反射光波长漂移量较大，适合检测高浓度氢气；200nm的Pt/WO3薄膜在有氧环境下与氢气反应引起薄膜的物理性质变化较好，薄膜反射光影响弱光栅光强较大，即灵敏度较大，可检测1ppm氢气浓度变化，适合检测超低浓度氢气，灵敏度。关键词：光纤光栅传感器；光加热；氢气敏感薄膜；光信号处理AbstractFiber Grating Sensors due to the nature of hydrogen safety, immunity to electromagnetic interference, small size and other characteristics have been widely concerned, however, the optimization of the performance of hydrogen sensitive materials and the improvement of the sensitivity of low concentration hydrogen detection still need to be solved urgently.In this paper, from four aspects of from the hydrogen-sensitive film types, the thickness, the temperature and the test environment atmosphere to explore the hydrogen response performance of the sensitive film. According to the optical signal processing module, the change of the wavelength and the intensity of the light reflected by the fiber grating is observed to judge the hydrogen response performance of the film. The main performance parameters are sensitivity, long-term stability and repeatability.The experimental results show that 300nm thickness of Pd/Ni thin film is in the state of heating,and the physical properties of the films are better due to the hydrogen reaction,resulting in a larger wavelength shift of the grating reflected light,it’s suitable for measuring high concentrations of hydrogen. 200 nm Pt / WO3 thin films in amb