毕业设计 多晶硅铸锭石英坩埚和氮化硅涂层的研究.docVIP

多晶硅铸锭石英坩埚和氮化硅涂层的研究 摘 要 在多晶硅生产工艺中作为多晶硅铸锭关键的辅助材料石英坩埚和氮化硅，辅材内的杂质含量不仅影响着多晶硅的少子寿命，而且会影响着硅锭的脱模效果。原则上讲，使用纯度越高的辅材其铸锭质量就越好，但在实际生产中过高追求质量往往会增大投入，企业真正追求的是投入产出比。本文主要研究不同辅材对铸造多晶硅锭性能的影响，一方面对铸锭辅材生产厂家的产品开发或产品升级具有一定的指导意义，另一方面提示多晶硅铸锭厂家应根据不同辅材开发不同的工艺，有助于生产高质量的多晶硅锭，同时也降低了生产成本，提高企业生产效益。 本工作利用微波光电导衰减仪(μ-PCD)、红外扫描仪(SIRM)等测试方法对铸造多晶硅中的杂质阴影以及少子寿命的分布特征进行了系统的研究。研究发现，氮化硅颗粒比表面积大，不利于硅锭的顺利脱模。使用不同厂家的石英坩埚、氮化硅铸锭，硅锭的底部红区长度存在明显不同，硅锭的少子寿命和顶部红区长度也存在明显差异。这就要求在工艺生产中，根据产品质量及制造成本的要求，针对不同厂家的石英坩埚和氮化硅，通过实验优化出投入产出比最小的辅材组合，对降低铸锭厂家制造成本，提高企业竞争力有很大的帮助。 关键词：多晶硅铸造，杂质，石英坩埚，氮化硅，少子寿命 Study on Quartz Crucible and Silicon Nitride Coating for Casting Polycrystalline silicon ABSTRACT In the polysilicon production process,as much crystal ingot casting key auxiliary materials quartz crucible and Si3N4,the content of impurities not only affects the minority carrier lifetime of silicon ingot,also affects patterns effect of silicon ingot.In principle,the higher purity speak the complementary material using,the better the quality of its silicon ingots,but in actual production high quality tends to increase investment pursuit,to enterprise the input-output ratio.This paper mainly studies different complementary material of casting polycrystalline silicon ingots,on the one hand, the influence on the performance of the bubble complementary material manufacturer in the product development or product upgrades has certain directive significance,on the other hand ,many crystal ingot casting factory should develop different technology according to different auxiliary materials,helps to manufacture high quality polycrystalline silicon ingot, also reduces production cost, improves production efficiency. In this work,the shade of impurities in casting polycrystalline silicon as well as their impacts on the minority carrier lifetime in mc-si ingots have been systematically studied by means of Microwavephoto Conductive Decay(μ-PCD),Scanning Infrared Microscopy(SIRM).Study found that Si3N4 particle specific surface area,going against the silic