《功能薄膜材料》课件PPT第7章 薄膜生长的成核长大动力学.ppt

一般以表面扩散的方式 可用于测量扩散系数 * Coalescence occurs as a result of collisions between separate island-like crystallites (or droplets) as they execute random motion. Evidence provided by the field ion microscope, which has the capability of resolving individual atoms, has revealed the migration of dimer and trimer clusters. Electron microscopy has shown that crystallites with diameters of ~ 50-100 A can migrate as distinct entities provided the substrate temperature is high enough. Interestingly, the mobility of metal particles can be significantly altered in different gas ambients. Not only do the clusters translate, but they have been observed to rotate as well as even jump on each other and sometimes reseparate thereafter! Cluster migration has been directly observed in many systems, * P677 f(t)是转换分数（即生长部分与总的部分的比率）, The vocabulary of polycrystalline film formation, particularly terms such as nucleation, growth, and coalescence, has a familiar ring in the metallurgical literature of solid-state phase transformations. For example, a cold worked metal matrix transforms by nucleation of recrystallized grains (islands) followed by growth, thus consuming the surrounding matrix so that there is less area available for new nuclei. During recrystallization one region will start ahead of others because of some favorable local composition, temperature, defect, or bias in the system. Then nucleation occurs elsewhere, and later somewhere else, while growth continues independently in regions of prior nucleation. The situation is much like rain droplets falling on a pond. Where rain impinges on the pond, surface wave nuclei are created. The circular ripples grow outward and begin to impinge on one another. When all of the prior untransformed matrix disappears by grain growth and impingement or coalescence, recrystallization is complete. So, too, for grain formation during thin-film formation. It should be noted that the Avrami equation strictly applies to closed systems transforming und