光电元件的近场光学检测-德霖.pdfVIP

德霖學報「第 30期」 2016年 12月 光電元件的近場光學檢測 光電元件的近場光學檢測 陸念華 德霖技術學院 電子工程系 摘要 我們以短針型輕敲式音叉近場掃描光學顯微儀在收集模式的操作條件下，分別針對 光電被動元件和主動元件做近場光學檢測。短針型輕敲式音叉模式在音叉的輕敲頻率工 作時提供了具穩定度及高 Q 因子的優異特性，這項特點對於須使用長光纖的輕敲式音叉 近場掃描光學顯微實驗是非常有幫助的。在本實驗，我們首先以收集模式的短針型輕敲 式音叉近場掃描光學顯微儀來量測不同波長光波在單模通訊用光纖內的主要傳播模 態。另外，我們亦將近場掃描光學顯微儀結合了分光儀，用以觀察強化分佈式布拉格反 射鏡吸收基板 AlGaInP 發光二極體結構在發光表面上不同位置的近場光致發光。 關鍵詞：發光二極體，近場掃描光學顯 微術，光纖，光致發光，傳播模態 Near-field Optical Characterization of Optoelectronic Devices Nien Hua Lu Department of Electronic Engineering, De Lin Institute of Technology Abstract We use the collection mode of the short-tip tapping-mode tuning fork near-field scanning optical microscope (TMTF-NSOM) to characterize the near-field optical properties of the passive and active optoelectronic devices. The short-tip TMTF scheme provides a stable and high Q factor at the tapping frequency of the tuning fork and will be very helpful when long optical fibers have to be used in the NSOM measurements. In this experiment, collection mode of short-tip TMTF-NSOM is performed to image the dominant propagating modes of a single-mode telecommunication optical fiber. Furthermore, in combination with a spectrometer, collection mode TMTF-NSOM is used to measure the spatially resolved near-field photoluminescence on the top surface of a distributed-Bragg-reflector-enhanced absorbing substrate AlGaInP light-emitting diode. Keywords: light-emitting diode, near-field scanning optical microscopy, optical fiber, photoluminescence, propagating mode 1 德霖學報第 30 期 壹、前言